Pressure-based mass flow controller "GP200 series"
Maximize the best performance! The latest pressure-based mass flow for pioneering semiconductor processes.
The GP200 series adopts differential pressure sensors instead of conventional pressure sensors and places the control valve downstream of the sensor, significantly improving the accuracy and reproducibility of flow measurement compared to traditional pressure-based MFCs. 【Features】 ■ Reduction of measurement error ■ Suitable for all process conditions ■ High-precision flow control ■ Reduces valve leakage to 1/100 *For more details, please contact us.
- Company：ITWジャパン
- Price：Other
